Existence of an Epitaxially Ordered Phase in the Buried Oxide of SIMOX Wafers

Autor:	Kazunori Fukuda, Takayoshi Shimura, Masataka Umeno, Takuji Hosoi
Rok vydání:	2001
Předmět:	Crystallography Materials science business.industry Phase (matter) Optoelectronics Silicon on insulator General Materials Science Wafer Condensed Matter Physics business Epitaxy Atomic and Molecular Physics and Optics Buried oxide
Zdroj:	Solid State Phenomena. :485-490
ISSN:	1662-9779
DOI:	10.4028/www.scientific.net/ssp.82-84.485
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::38b6504142ae1711bf9db913f890f9c9 https://doi.org/10.4028/www.scientific.net/ssp.82-84.485 Zobrazit plný text záznamu