Effect of Vacuum Heat Treatment on the Structure and Electrical Properties of the Multilayer In2O3/SnO2 System

Autor:	S. Yu. Pankov, I. V. Babkina, M. N. Kopytin, A. V. Sitnikov, O. V. Zhilova, Yu. E. Kalinin, M. A. Kashirin, V. A. Makagonov
Rok vydání:	2020
Předmět:	Range (particle radiation) Temperature resistance Materials science Sputtering Bilayer General Physics and Astronomy Composite material
Zdroj:	Bulletin of the Russian Academy of Sciences: Physics. 84:1104-1106
ISSN:	1934-9432 1062-8738
DOI:	10.3103/s1062873820090397
Popis:	Multilayer films (In2O3/SnO2)69 are obtained via ion-beam sputtering. The effect vacuum heat treatment in the range of room temperature to 600°C has on the structure and electrical properties is studied. It is found that the structures obtained with different thicknesses of the In2O3/SnO2 bilayer are stable up to a heat treatment temperature of 400°С. Raising the temperature to 600°C alters the sign of the coefficient of temperature resistance from negative to positive.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::38b0aa05bb518e89c88420c790d29701 https://doi.org/10.3103/s1062873820090397 Zobrazit plný text záznamu Full text from SpringerLink