Experimental Study of the Growth of the SiC Rod using Nd-Yag Laser Chemical Vapor Deposition
| Autor: | Jae-Eun Ryu, Young Hoon Lim |
|---|---|
| Rok vydání: | 2004 |
| Předmět: |
Materials science
Hybrid physical-chemical vapor deposition business.industry Mechanical Engineering Ion plating technology industry and agriculture Chemical vapor deposition Combustion chemical vapor deposition Electron beam physical vapor deposition Pulsed laser deposition Optoelectronics Deposition (phase transition) Thin film business |
| Zdroj: | Transactions of the Korean Society of Mechanical Engineers A. 28:481-488 |
| ISSN: | 1226-4873 |
| Popis: | Laser chemical vapor deposition can be used as a new approach for a rapid prototyping technique. The purpose of the study is to fabricate several 3-dimensional objects that are relatively simple as well as to find the characteristics of SiC rod growth that is the first step in developing a new rapid prototyping technique with laser chemical vapor deposition. In the study, SiC rods were generated with varying precursor pressure for 5 minutes. Deposition rates with varying precursor pressure, shapes of rods, surface roughness and component organization were investigated, in particular. Finally, several simple objects like a branch or a propeller were successfully fabricated using laser chemical vapor deposition. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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