Mass spectrometry study of the kinetics of CdTe molecular-beam epitaxy: Part I. Cd, Te2, and CdTe

Autor:	V. I. Mikhailov, L. E. Polyak, V. M. Kanevskii
Rok vydání:	2007
Předmět:	Chemistry Desorption Analytical chemistry Evaporation chemistry.chemical_element Activation energy Thin film Tellurium Mass spectrometry Epitaxy Surfaces Coatings and Films Molecular beam epitaxy
Zdroj:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 1:342-347
ISSN:	1819-7094 1027-4510
DOI:	10.1134/s1027451007030196
Popis:	Surface processes in CdTe molecular-beam epitaxy were studied using in situ mass spectrometry. Modulated molecular Cd and Te2 beams were used for measuring kinetic parameters. The experiments were performed at crystal temperatures of 600–730 K. The results were processed within a model in which condensation and evaporation occur through adsorption and desorption stages. The desorption rate was 2–10 s−1 for Te2 and more than 30 s−1 for Cd. The CdTe evaporation activation energy and desorption energies were determined as E ev = 1.1 eV, E d (Cd) = 1.0 eV, and E d (Te) = 0.6 eV. The adsorbate coverage was estimated as n(Cd) < 0.01 and n(Te) = 0.1–1 Te.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::38a0dc76a1ef5b282b73f02f90b96cda https://doi.org/10.1134/s1027451007030196 Zobrazit plný text záznamu Full text from SpringerLink