| Autor: |
Olaf Wunnicke, Willem Frederik Adrianus Besling, R.A.M. Wolters, L. van Leuken-Peters, J.T.M. van Beek, M. A. A. in 't Zandt, Martijn Goossens, H. Kwinten, Peter G. Steeneken, K. Reimann, Hilco Suy, V. Aravindh |
| Rok vydání: |
2011 |
| Předmět: |
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| Zdroj: |
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems. |
| Popis: |
We report on small, low-ohmic RF MEMS switches with a circular membrane actuator design. A low temperature process is used to manufacture both the MEMS switch as well as its hermetic, thin-film package resulting in a very small footprint device. The hermetic seal of the package significantly increases the switch lifetime and reliability. The switches demonstrate good RF performance and high switching speeds. A comparison with other MEMS switches reveals that these MEMS switches possess a low on-resistance while occupying only a very small area on the wafer. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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