Moving fringe detection for ultra precision position measurement

Autor: Yoon Keun Kwak, Soohyun Kim, Jong Ahn Kim, Jong Hoon Yi
Rok vydání: 2002
Předmět:
Zdroj: Proceedings of the 17th IEEE Instrumentation and Measurement Technology Conference [Cat. No. 00CH37066].
Popis: A novel method for the measurement of precision position using an interferometer is proposed This method is to detect the fringe movement of interferograms from the fringe peak positions, which is linearly related to the displacement of an object. The error analysis and simulation were carried out considering the speckle noise, the Gaussian noise and the wavefront distortions. The results of simulation show that this method is effective for the measurement of precision position. An experiment was implemented for verifying this method.
Databáze: OpenAIRE