Wafer-Level Characterization of Silicon Nitride CWDM (De)Multiplexers Using Bayesian Inference

Autor: Tina X. Guo, Hong Wang, Soon Thor Lim, Thomas Y. L. Ang, Ching Eng Png, Jun Rong Ong
Rok vydání: 2020
Předmět:
Zdroj: IEEE Photonics Technology Letters. 32:917-920
ISSN: 1941-0174
1041-1135
DOI: 10.1109/lpt.2020.3004850
Popis: A cascaded Mach-Zehnder interferometer based filter for coarse wavelength (de)multiplexing (CWDM) at the O-band is fabricated and tested on a silicon nitride on SOI platform. We characterize the chip-to-chip performance variability of the filter devices on a wafer. Using the optical measurement data, we apply Bayesian inference methods to estimate the waveguide geometery parameters and also quantify the uncertainty of the estimates.
Databáze: OpenAIRE