| Autor: |
Lorenzo Faraone, Michal Zawierta, K. K. M. B. Dilusha Silva, Adrian Keating, Mariusz Martyniuk, Gino Putrino, Dhirendra Kumar Tripathi, Gurpreet Singh Gill |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). |
| Popis: |
In electrostatically actuated microelectromechanical systems (MEMS), the risk of snapping-down moveable beams and membranes increases with decreasing gap between actuation electrodes. Van der Waals forces play a significant role in subsequent stiction of actuated beams with the substrate or other surfaces. In order to enable recovery of the MEMS devices from the snap-down position, the role of size and roughness of the contact surface between anti-stiction bumps and the underlying surface is studied. This paper examines the design parameters of anti-stiction bumps, which allow restoring forces to recover from snap-down position and avoid device failure. Subsequently, the fabrication of these bumps is presented. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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