Research on femtosecond infrared laser cutting 4H-SiC wafer

Autor:	chen Chen, Qingchun Zhao, Mingliang Yao, Yanfei Shen, Yongdu Li, Yunsong Huang
Rok vydání:	2021
Předmět:	Materials science business.industry Femtosecond Far-infrared laser Optoelectronics Wafer business
Zdroj:	Sixteenth National Conference on Laser Technology and Optoelectronics.
DOI:	10.1117/12.2602464
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3868e31612870c43819b1698e1b39092 https://doi.org/10.1117/12.2602464 Zobrazit plný text záznamu