Moisture and Phosphorous Sensitivity of Sacrificial Spin‐On‐Glass Dielectric Planarization Process
| Autor: | Pankaj K. Sinha, John A. Smythe |
|---|---|
| Rok vydání: | 1991 |
| Předmět: |
Spin glass
Materials science Moisture Renewable Energy Sustainability and the Environment Delamination Chemical vapor deposition Dielectric Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Chemical-mechanical planarization Scientific method Materials Chemistry Electrochemistry Sensitivity (control systems) Composite material |
| Zdroj: | Journal of The Electrochemical Society. 138:854-856 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.2085690 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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