The control of oscillation mode in silicon microbeams using silicon nitride anchor

Autor:	Han Young Yu, Seongjae Lee, Chang Geun Ahn, Sangwook Lee, Young Jun Kim, Yarkyeon Kim, Yong Sun Yoon, In Bok Baek, Bong Kuk Lee, Hakseong Kim, Won Ik Jang
Rok vydání:	2014
Předmět:	Materials science Physics and Astronomy (miscellaneous) Silicon Hybrid silicon laser business.industry Oscillation chemistry.chemical_element Nanotechnology chemistry.chemical_compound chemistry Silicon nitride Nanosensor Electric field Optoelectronics Gravimetric analysis business Microfabrication
Zdroj:	Applied Physics Letters. 105:103101
ISSN:	1077-3118 0003-6951
Popis:	We designed and fabricated gravimetric sensors composed of silicon (Si) microbeams surrounded by silicon nitride (SiN) anchors. The oscillation properties of the fabricated devices show that a single oscillation mode originating from quasi-one-dimensional microbeams appears at an applied alternating electric field, which motion is well matched to the theoretical predictions and is much different from the dimensionally mixed oscillation modes in normal non-anchored devices. In addition, in order to elucidate the possibilities of the devices for mass sensing applications, we measured the frequency shift as a function of mass loading in a self-assembled monolayer of 3-aminopropyltrimethoxysilane and Au nanoparticles. The resulting limit of detection was 1.05 × 10−18 g/Hz, which is an extremely high value for micro electromechanical system gravimetric sensors relative to the normal ones.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::38501b305b1728b605bdc6779ceff07c https://doi.org/10.1063/1.4895119 Zobrazit plný text záznamu