Reactor materials for high purity HVPE GaN growth: a thermodynamic analysis

Autor:	Andrey Zubrilov, Natalia Bochkareva, Andrey Leonidov, Y. G. Shreter, Vladislav Voronenkov
Rok vydání:	2019
Předmět:	History Materials science Hydrogen Hydride Inorganic chemistry chemistry.chemical_element Gallium nitride Epitaxy Computer Science Applications Education chemistry.chemical_compound chemistry Boron nitride Gallium Hydrogen chloride Platinum
Zdroj:	Journal of Physics: Conference Series. 1410:012004
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/1410/1/012004
Popis:	The chemical resistance of quartz, aluminum oxide, boron nitride, molybdenum, and platinum in the environment of the hydride vapor phase epitaxy of gallium nitride was estimated by chemical equilibrium calculation. The interaction of materials with hydrogen, hydrogen chloride, chlorine, ammonia, and gallium chlorides was analyzed. The conditions in which the use of each material is permissible were determined.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::381dffacf43c7c0d6318fe3729d3acef https://doi.org/10.1088/1742-6596/1410/1/012004 Zobrazit plný text záznamu