P.15: Influence of Photo-Thermal Pre-treatment on Electrical Characteristics and Reliability of Zn-Sn-O Thin-Film Transistors

Autor:	Yu Chun Chen, Tien-Yu Hsieh, Hung Wei Li, Ting-Chang Chang, Wan-Fang Chung
Rok vydání:	2013
Předmět:	Pre treatment Materials science genetic structures Passivation business.industry Instability Amorphous solid Stress (mechanics) Reliability (semiconductor) Thin-film transistor Thermal Electronic engineering Optoelectronics sense organs business
Zdroj:	SID Symposium Digest of Technical Papers. 44:1037-1039
ISSN:	0097-966X
DOI:	10.1002/j.2168-0159.2013.tb06400.x
Popis:	This study presents the influence of photo-thermal pre-treatment on the electrical characteristic and bias-induced instability of amorphous Zn-Sn-O thin film transistors. Even in the vacuum ambient, the passivation-free device with photo-thermal pre-treatment shows more stability after stress than that without pre-treatment. This indicates pre-treatment should be conducted before passivation process.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::381a6613d172d9e7f59b4891b0172806 https://doi.org/10.1002/j.2168-0159.2013.tb06400.x Zobrazit plný text záznamu Plný text