Suppression of Bipolar Degradation in Deep-P Encapsulated 4H-SiC Trench MOSFETs up to Ultra-High Current Density

Autor: Shuhei Mitani, Junichi Uehara, Masato Noborio, Yuichi Takeuchi, Aiko Ichimura, Yasuhiro Ebihara, Kazuhiro Tsuruta
Rok vydání: 2019
Předmět:
Zdroj: 2019 31st International Symposium on Power Semiconductor Devices and ICs (ISPSD).
DOI: 10.1109/ispsd.2019.8757567
Popis: The bipolar degradation of Deep-p encapsulated 4H-SiC trench MOSFETs was investigated by using the pulse-current conduction system up to ultra-high current density. The fabricated MOSFETs exhibit the low hole injection compared with the PN diodes and conventional MOSFETs, resulted in the fabricated MOSFETs suppressed the bipolar degradation up to a current density of 3000 A/cm2.
Databáze: OpenAIRE