An annealing process for mechanical strength improvement of Parylene micropore-arrayed membrane
| Autor: | Wangzhi Dai, Yaoping Liu, Wengang Wu, Han Xu, Wei Wang |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Materials science
Fabrication Silicon Annealing (metallurgy) chemistry.chemical_element 02 engineering and technology Microporous material 021001 nanoscience & nanotechnology Microstructure chemistry.chemical_compound Membrane Parylene chemistry Mechanical strength Composite material 0210 nano-technology |
| Zdroj: | NEMS |
| DOI: | 10.1109/nems.2017.8017109 |
| Popis: | This paper used an effective annealing process to improve the performance of Parylene C micropore-arrayed membranes fabricated with Parylene C moulding strategy. The results indicated that the annealing treatment at 320°C for 2h in nitrogen sealed the keyholes, which were unavoidably generated in the conventional Parylene C moulding process, because of melting and reflow at high temperature. A chromatic confocal imaging (CCI) based platform was established to test the mechanical properties of the prepared Parylene C micropore-arrayed membranes after annealing treatment, with the one without annealing as comparison. The mechanical testing results demonstrated that the annealing treated Parylene C micropore-arrayed membranes presented 13.4% higher mechanical strength compared to the unannealed one. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|