Asymmetric AC electrophoresis with insulated electrodes: Toward positional control of microand nanoscale devices

Autor:	Takeshi Shiomi, Changqing Zhan, Watanabe Keiji, Paul J. Schuele, John W. Hartzell, Akihide Shibata, Kenji Komiya, Sato Takuya, Hiroshi Kotaki, Mark A. Crowder
Rok vydání:	2013
Předmět:	Imagination Chemical substance Materials science genetic structures Silicon business.industry media_common.quotation_subject Analytical chemistry chemistry.chemical_element Dielectric Electrochemistry Electrophoresis chemistry Electrode Optoelectronics business Nanoscopic scale media_common
Zdroj:	2013 IEEE International Meeting for Future of Electron Devices, Kansai.
Popis:	This paper demonstrates electrophoresis of silicon micro-rods by applying asymmetric AC bias to two electrodes capped with a thin dielectric film. The silicon micro-rods migrate bi-directionally when asymmetric AC bias is applied to the electrodes. The insulated electrodes significantly contribute to elimination of bubbling and contamination originating from electrochemical reactions, which makes adoption of the technique to mass production processes realistic. This technique is widely applicable to positional control of small objects including micro- and nanoscale devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::37d464be578f63f0e70e17578ec54e9f https://doi.org/10.1109/imfedk.2013.6602274 Zobrazit plný text záznamu