| Popis: |
Sputtering yields and changes of relief for Cu-Ni alloys with different concentration (2.5, 10, 20, 50, 80% of Ni) under 600 eV Ar+ ion bombardment in the temperature range 100–600°C were investigated. It has been proved that the sputtering rate of alloys decreases with an increase of the bombardment dose. Analysis of irradiated surfaces by the SEM method has shown that ion bombardment stimulates the growth of cone-like features on the surface. For high doses (5–6 × 1019 ion cm 2 ), the surface appeared to be covered by narrow disposed hills with a height of a few μm. The sputtering yield, density and sizes of the hills very weakly depend on the dose of bombardment. |
