Plasma corrosion resistance of aluminosilicate glasses containing Ca, Y and B under fluorocarbon plasma with Ar+
| Autor: | Jae Ho Choi, Hyein Na, Hyeong-Jun Kim, Jewon Park |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science technology industry and agriculture chemistry.chemical_element 02 engineering and technology Calcium equipment and supplies 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure 01 natural sciences Electronic Optical and Magnetic Materials Corrosion chemistry.chemical_compound chemistry Aluminosilicate Boron oxide 0103 physical sciences Materials Chemistry Ceramics and Composites Fluorine Sublimation (phase transition) 0210 nano-technology Calcium oxide Nuclear chemistry |
| Zdroj: | Journal of Non-Crystalline Solids. 521:119498 |
| ISSN: | 0022-3093 |
| DOI: | 10.1016/j.jnoncrysol.2019.119498 |
| Popis: | In this study, the corrosion resistance of alumino-silicate glass containing Ca, Y and B is assessed against CF4/O2/Ar plasma, with the results compared to those of poly-crystalline and single-crystalline alumina. All of the alumino-silicate glasses containing Ca, Y and B were more resistant than sintered alumina to a plasma-etching gas. Glass samples with boron oxide were less corroded by plasma than those without B2O3, and their surfaces were contaminated by the CFx generated by the plasma reaction. CaO-Y2O3-Al2O3-SiO2 (CYAS) showed a lower etch rate than sapphire and retained a smooth surface microstructure, unlike sintered alumina. The plasma resistance improved with an increase in the calcium oxide content. The improved plasma resistance of CYAS glass is thought to be due to the high sublimation temperature of the calcium fluoride and the strong atomic binding energy of the calcium ions in the glass. |
| Databáze: | OpenAIRE |
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