Nanoimprint post processing techniques to address edge placement error

Autor:	Makoto Ogusu, Masaki Ishida, Masahiro Tamura, Keita Sakai, Toshiki Ito, Yuto Ito, Isao Kawata, Hideki Kunugi, Shuhei Tamura, Ryuichi Asako, Keisuke Tanaka, Tomohito Yamaji
Rok vydání:	2023
Zdroj:	Novel Patterning Technologies 2023.
DOI:	10.1117/12.2658125
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::37bd4a23718395c382719c0b43977f0c https://doi.org/10.1117/12.2658125 Zobrazit plný text záznamu