Reduction in the Density of Cracks and the Substrate Temperature Dependence of Orientation in the Freestanding BaTiO3 Thin Films

Autor:	Dai-ichiro Yoshida, Kyohei Deguchi, Satoru Kishida, Kentaro Kinoshita, Akihiro Hanada
Rok vydání:	2010
Předmět:	Materials science Si substrate Orientation (geometry) General Materials Science Surfaces and Interfaces Substrate (electronics) Thin film Composite material Instrumentation Spectroscopy FOIL method Deposition (law) Clamping
Zdroj:	Journal of the Vacuum Society of Japan. 53:421-423
ISSN:	1882-4749 1882-2398
DOI:	10.3131/jvsj2.53.421
Popis:	Freestanding BaTiO3 (BTO)/Pt films were fabricated and the orientation and crack density of BTO films were investigated as a function of substrate temperature, Tsub, during BTO deposition. When Tsub is low, the BTO film exhibits preferentially (101)-orientated structure. On the other hand, (001)-orientation becomes dominant when Tsub is high. This means that controlling of orientation by changing the Tsub is possible. In addition, the density of cracks of the BTO film on the Pt foil was lower than on the Pt/Ti/SiO2/Si substrate, as a result of the removal of clamping effect of the substrate.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::37b7e1e97ea62b4be4442475f2774358 https://doi.org/10.3131/jvsj2.53.421 Zobrazit plný text záznamu