Popis: |
This chapter shortly reviews the scientific background of Atomic Force Acoustic Microscopy (AFAM), the basic theoretical models, the experimental techniques to obtain quantitative values of local elastic constants, and non-linear AFAM. Analytical and finite element models describing transverse flexural vibrations of AFM cantilevers with and without tip-surface contact are recapitulated. The models are suitable for micro fabricated silicon cantilevers of approximately rectangular cross section which are typically used in AFAM. Experimental methods to obtain single-point as well as array measurements and full spectroscopy images are discussed in combination with the respective reference methods for calibration. In a non-linear AFAM experiment, the vibration amplitudes of the sample surface and the cantilever are measured quantitatively with an interferometer at different excitation amplitudes, and the full tip-sample interaction force curve is reconstructed using a frequency dependent transfer function. |