| Popis: |
In an effort to develop a high‐performance, miniature, directional acoustic sensor, the advantages of closed‐loop operation are investigated. A nonlinear state‐variable model of a generalized sensor system is presented. The sensor model is differential capacitive with electrostatic actuation for force rebalance of the proof mass. The physical model parameters are chosen to replicate scales and tolerances of typical MEMS devices with particular attention to nonlinearities associated with the electrostatic force and large deflections. Modeling and simulation will be presented for various control schemes and results will be compared in terms of important operational criteria such as dynamic range, bandwidth, linearity, and noise. [Work supported by the ONR AASERT program.] |
