A Model for Electrostatic Actuation in Conducting Liquids

Autor:	Hrishikesh V. Panchawagh, Roop L. Mahajan, Thomas L. Sounart
Rok vydání:	2009
Předmět:	Materials science Mechanical Engineering Mechanics Computer Science::Other Computer Science::Robotics Vibration Surface micromachining Critical frequency Electronic engineering Fluidics Electrical and Electronic Engineering Actuator Displacement (fluid) Electrical impedance Voltage
Zdroj:	Journal of Microelectromechanical Systems. 18:1105-1117
ISSN:	1941-0158 1057-7157
DOI:	10.1109/jmems.2009.2025552
Popis:	This paper presents a generalized model that describes the behavior of micromachined electrostatic actuators in conducting liquids and provides a guideline for designing electrostatic actuators to operate in aqueous electrolytes such as biological media. The model predicts static actuator displacement as a function of device parameters and applied frequency and potential for the typical case of negligible double-layer impedance and dynamic response. Model results are compared to the experimentally measured displacement of electrostatic comb-drive and parallel-plate actuators and exhibit good qualitative agreement with experimental observations. The model is applied to show that the pull-in instability of a parallel-plate actuator is frequency dependent near the critical frequency for actuation and can be eliminated for any actuator design by tuning the applied frequency. In addition, the model is applied to establish a frequency-dependent theoretical upper bound on the voltage that can be applied across passivated electrodes without electrolysis.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3748eea135f53baaad4b2d8f01627bea https://doi.org/10.1109/jmems.2009.2025552 Zobrazit plný text záznamu