A Method for Dosing Solid Sources for MOVPE: Excellent Dosimtery Reproducibility from a Saturated Solution of Trimethylindium

Autor:	A. W. Gal, Dario M. Frigo, J. H. Wilkie, G. P. M. van Mier
Rok vydání:	2005
Předmět:	Reproducibility chemistry.chemical_compound Materials science chemistry Indium phosphide Analytical chemistry Metalorganic vapour phase epitaxy Trimethylindium Epitaxy
Zdroj:	Sixth International Conference Metalorganic Vapor Phase Epitaxy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::371d9abe3518397fff44442c95cd5c51 https://doi.org/10.1109/movpe.1992.664991 Zobrazit plný text záznamu