Nd: Yag Laser Ablation of BaTiO3 Thin Films

Autor:	G. Peterson, J. J. Mcnally, Judith A. Ruffner, Ursula J. Gibson
Rok vydání:	1990
Předmět:	Materials science business.industry Partial pressure Nanosecond Laser law.invention X-ray laser chemistry.chemical_compound chemistry law Nd:YAG laser Picosecond Barium titanate Optoelectronics Thin film business
Zdroj:	MRS Proceedings. 191
ISSN:	1946-4274 0272-9172
DOI:	10.1557/proc-191-19
Popis:	We have deposited thin films of barium titanate onto a variety of substrates, using picosecond and nanosecond pulsed Nd: YAG lasers. The films were deposited from a hot-pressed target onto substrates that were heated by either CO2 laser or conventional means, in a partial pressure of oxygen. Highly oriented films resulted from depositions onto MgO and LiF substrates held at temperatures greater than 600C.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::370308209b9a1cf08ecab6882e82e990 https://doi.org/10.1557/proc-191-19 Zobrazit plný text záznamu Full text from SpringerLink