Electro-optical characterization of h-BN thin film waveguides by prism coupling technique
| Autor: | A. Bath, J. Boudiombo, P. Thevenin, J. C. Loulergue |
|---|---|
| Rok vydání: | 1999 |
| Předmět: |
Materials science
business.industry Mechanical Engineering Chemical vapor deposition Condensed Matter Physics Ion source chemistry.chemical_compound Optics chemistry Mechanics of Materials Plasma-enhanced chemical vapor deposition Boron nitride Electrode Optoelectronics Deposition (phase transition) General Materials Science Thin film Spectroscopy business |
| Zdroj: | Materials Science and Engineering: B. 59:244-247 |
| ISSN: | 0921-5107 |
| Popis: | Waveguides were fabricated by deposition of boron nitride thin films onto glass substrates by a microwave plasma enhanced chemical vapor deposition (PECVD) process. We have characterized the optical linear properties of the as-deposited layers by m-lines spectroscopy. We have used a simple method based on the shift of the synchronous angles of the guided modes to investigate the electro-optic tensor r ij using co-planar electrodes. With TM polarized light the value of r eff computed is of the order of 5 pm V -1 . |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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