| Autor: |
Arie van Doorn, Chris Van Haag, Gunnar A. Niklasson, Peter Heszler, J. Ederth, Claes-Goeran Granqvist, M. J. Jongerius, A. Hultåker, Detlef Burgard |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
BioMEMS and Smart Nanostructures. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.454615 |
| Popis: |
Thin films were made by spinning a dispersion of tin-doped indium-oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity (rho) of 0.3 (Omega) m and some optical absorption. Annealing in vacuum at 200 to 400 degree(s)C for 2 h, and subsequently in air at 500 degree(s)C for 2 h, produced films with (rho) equals10--3 (Omega) m and a visible transmittance exceeding 90 %. Leaving out the vacuum treatment yielded higher resistivity.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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