| Autor: |
Farid M. Tranjan, S.K. Jones, Stephen M. Bobbio, T.D. DuBois, J.D. Jacobson, M.D. Kellam, Scott H. Goodwin-Johansson, B.W. Dudley |
| Rok vydání: |
2002 |
| Předmět: |
|
| Zdroj: |
[1993] Proceedings IEEE Micro Electro Mechanical Systems. |
| DOI: |
10.1109/memsys.1993.296931 |
| Popis: |
Integrated force arrays (IFAs), which are flexible metallized membranes that can be patterned using the techniques of VLSI electronics and that undergo substantial deformation when voltage is applied, have been developed. They may be configured as macroscopic actuators or used in highly articulated systems of great complexity. The theory of operation, the methods of construction, and the observational results for IFA test structures are presented. > |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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