| Autor: |
Sherwin A. Afshar, Qian-Yi Xie, Clark T.-C. Nguyen, Alper Ozgurluk |
| Rok vydání: |
2020 |
| Předmět: |
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| Zdroj: |
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF). |
| DOI: |
10.1109/ifcs-isaf41089.2020.9234862 |
| Popis: |
The use of a stress-buffered array-composite of six $13.4-\mu \mathrm{m}$ radius capacitive-gap transduced radial-contour mode polysilicon micromechanical disk resonators with 36.1-nm electrode-to-resonator gaps has enabled a Pierce oscillator centered at 199.2 MHz with phase noise marks of −104.7dBc/Hz at 1-kHz offset and −149.6dBc/Hz far from the carrier, sufficient for smartphones. The 12-kHz to 20-MHz integrated jitter is 163.3fs, which yields an excellent jitter FoM of −251dB. The key to this demonstration is the use of $\lambda$ couplers to affect a 0° phase shift across the array terminals; and electrodeless resonators to buffer the effect of post-fabrication stress that otherwise might short disks to their electrodes when gaps are very small. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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