Fabrication and Characterization of Nickel Plated Micro-resonators for Noncommutative Orientation Control in Microrobots
| Autor: | Manheim, Marc |
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| Rok vydání: | 2020 |
| Předmět: | |
| DOI: | 10.13023/etd.2020.472 |
| Popis: | This thesis describes a procedure for fabricating arrays of microstructures out of SU-8 photoresist and nickel, which was developed with the goal of yielding microrobots capable of 1D rotation byway of magnetically-induced beam vibration that could be used for non-commutative orientation control. Several multi-layer geometries were designed, fabricated, tested and refined. In this process, micro-adhesion of multiple SU-8 layers was also studied. A method for depositing nickel via electroless plating was also developed, tested and characterized. While no microrobots were shown to produce rotation, the final results included beams that were capable of magnetically-induced vibration when subjected to an AC magnetic field. These samples were characterized to determine resonant frequency of the individual beams. © 2020 Marc Manheim |
| Databáze: | OpenAIRE |
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