Development and evaluation of three-dimensional metrology of nanopatterns using electron microscopy

Autor:	Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz
Rok vydání:	2022
Zdroj:	Journal of Micro/Nanopatterning, Materials, and Metrology. 21
ISSN:	2708-8340
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::36b142b08da37a5765fab98436114643 https://doi.org/10.1117/1.jmm.21.2.021202 Zobrazit plný text záznamu