On the investigation of spiral inductors processed on Si substrates with thick porous Si layers

Autor:	A.S. Royet, Denis Pellissier, R. Cuchet, Pascal Ancey
Rok vydání:	2004
Předmět:	Materials science Silicon Anodizing business.industry chemistry.chemical_element Substrate (electronics) Inductor Characterization (materials science) chemistry Q factor Electronic engineering Optoelectronics Porosity business Layer (electronics)
Zdroj:	Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710).
Popis:	This paper investigates the high frequency (HF) characterization of spiral inductors on various Si substrates. Some of them were chemically anodized in order to form a thick porous Si layer, which provides a low substrate loss and greatly enhanced inductor quality factor. The HF performance and behavior of these inductors have been analyzed by modeling and parameter extraction in order to compare all the substrates.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::36a36f4a024f5a106c23168b6e928d8b https://doi.org/10.1109/essderc.2003.1256823 Zobrazit plný text záznamu