Latch-Up Analysis on a 64K Bit Full CMOS Static RAM using a Laser Scanner

Autor: M. Noyori, T. Shiragasawa, T. Yonezawa, H. Shimura, K. Kagawa
Rok vydání: 1984
Předmět:
Zdroj: 22nd International Reliability Physics Symposium.
ISSN: 0735-0791
Popis: In order to quantitatively evaluate latch-up sensitivity on scaled CMOS LSIs, an advanced latch-up analyzer with a laser scanner has been developed. As a result of the application of the analyzer to a 64K bit full CMOS static RAM, the analyzer was found to be very useful in latch-up evaluation on CMOS LSIs. Furthermore, high sensitivity regions in the memory cell and a sensitivity distribution in the memory array block, which depend on pattern layout, have been clearly observed on the static RAM.
Databáze: OpenAIRE