Vector Network Analyzer Characterization of Parallel Plate Capacitors with High-K Dielectrics
| Autor: | Lee Kammerdiner, Thottam S. Kalkur, Elliott Philofsky, N. Cramer |
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| Rok vydání: | 2004 |
| Předmět: |
Materials science
business.industry ComputerSystemsOrganization_COMPUTER-COMMUNICATIONNETWORKS Analytical chemistry Condensed Matter Physics Filter capacitor Capacitance Electronic Optical and Magnetic Materials law.invention Capacitor Hardware_GENERAL Control and Systems Engineering law Transmission line Hardware_INTEGRATEDCIRCUITS Materials Chemistry Ceramics and Composites Optoelectronics Electrical and Electronic Engineering business Electrical impedance Microwave Decoupling (electronics) High-κ dielectric |
| Zdroj: | Integrated Ferroelectrics. 66:171-178 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584580490895040 |
| Popis: | Most applications of high-K paraelectrics involve microwave frequencies; tunable microwave filters and phase shifters are obvious examples. Applications such as power supply decoupling and some tunable microwave devices make use of discrete capacitors (i.e., not distributed along a transmission line). In these cases, a direct measurement of a discrete capacitor is preferable to inferring the capacitor's characteristics by overall device performance. Methods for microwave characterization are discussed for Pt/(Ba,Ca)(Ti,Zr)O3/Pt parallel-plate capacitors. Impedance, capacitance, and quality factor are extracted from vector network analyzer measurements from 45 MHz to 50 GHz. |
| Databáze: | OpenAIRE |
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