Combinatorial synthesis of Cr1 − xAlxN and Ta1 − xAlxN coatings using industrial scale co-sputtering
| Autor: | Velislava L. Terziyska, Nina Schalk, Christian Mitterer, Peter Polcik, Thomas Weirather, Christoph Czettl, Martin Kathrein, Corinna Sabitzer, S. Gangopadhyay, Sabrina Hirn |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Bilayer Industrial scale Nanotechnology 02 engineering and technology Surfaces and Interfaces Tribology engineering.material 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure 01 natural sciences Surfaces Coatings and Films Coating Sputtering 0103 physical sciences Materials Chemistry engineering Deposition (phase transition) 0210 nano-technology Layer (electronics) |
| Zdroj: | Surface Engineering. 32:252-257 |
| ISSN: | 1743-2944 0267-0844 |
| DOI: | 10.1179/1743294415y.0000000055 |
| Popis: | For a comprehensive understanding of the scientific relations between composition, microstructure and properties of hard coatings usually a multitude of deposition runs is necessary. Within the present work, a combinatorial deposition approach using triangular shaped segmented sputter targets was adapted for an industrial scale sputter system. Owing to the position of the substrates relative to the target segments, a wide range of compositions can be achieved within a single deposition run. To verify this concept, Cr1 − xAlxN reference coatings and Ta1 − xAlxN coatings, each with a base layer of TiAlN (i.e. a bilayer configuration), were synthesised. The effect of the varying chemical compositions on the structure and mechanical as well as tribological properties was investigated. This approach enables to efficiently identify promising coating compositions. |
| Databáze: | OpenAIRE |
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