ZnO-Based Transparent Conductive Layers Obtained by the Magnetron Sputtering of a Composite ZnO:Ga–Zn Cermet Target: Part 1
| Autor: | A. K. Akhmedov, V. M. Kanevsky, A. E. Muslimov, A. Sh. Asvarov, A. Kh. Abduev |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
010302 applied physics
Materials science Composite number 02 engineering and technology Substrate (electronics) Cermet Conductivity Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Chemical engineering Sputtering visual_art 0103 physical sciences visual_art.visual_art_medium Ceramic Thin film 0210 nano-technology |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 15:76-80 |
| ISSN: | 1819-7094 1027-4510 |
| Popis: | The comparative deposition of ZnO:Ga layers by the magnetron sputtering of a ZnO:Ga (3 mol %) ceramic target and a composite ZnO:Ga(3 mol %)–Zn(20 wt %) cermet target is performed in the direct current mode at substrate temperatures of 50°С and 200°С. Studies of the formation processes, structure, and functional characteristics of the layers obtained by the sputtering of targets of both types in an atmosphere of argon showed that an increase in the zinc content in the reagent flux upon heating of the substrate to 200°С promotes improvement in the structural perfection of the layers and conductivity accompanied with the preservation of a high coefficient of optical transmittance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink