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Films of the superconducting phase YBa 2 Cu 3 O x (YBCO) were deposited by CVD using an aerosol feed technique in a cold plasma reactor. Aerosol droplets containing the three precursors were generated by an ultrasonic nebulizer operating at 1.63 MHz, while a 50 kW RF generator, operating at 2.87 MHz, was used to simultaneously create the plasma and heat a stainless steel susceptor. The YBCO films were deposited on single crystal MgO substrates at an oxygen partial pressure of 1.3 kPa, at a substrate temperature of 850 °C, using a deposition period of 30 min. Four different solution concentrations were used to study the effect of concentration on the microstructure of the films. The dried particle size was determined to have a significant effect on the microstructure, composition and deposition rate of the films. |
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