Aerosol Charging and Neutralization and Electrostatic Discharge in Clean Rooms

Autor:	Wayne G. Fisher, Warren O. Kinstley, David Y.H. Pui, Benjamin Y. H. Liu
Rok vydání:	1987
Předmět:	Electrostatic discharge Chemistry Deposition (phase transition) Particle High voltage Atomic physics Electrostatics Electric charge General Environmental Science Particle deposition Ion
Zdroj:	Journal of the IEST. 30:42-46
ISSN:	0022-0906
DOI:	10.17764/jiet.1.30.2.wx17682658p58871
Popis:	This paper describes the role of electrical charge on particle transport and deposition and the neutralization of particle electrostatic charge by ionized air. The level of electrical charge on airborne particles and the rate of charge neutralization by bipolar ions have been reviewed and the effect of charge on particle deposition on semiconductor waters discussed. Finally, the use of high voltage ionizers for electrostatic control in clean rooms is discussed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::3614b5298ab814850fa14900ba6fb15b https://doi.org/10.17764/jiet.1.30.2.wx17682658p58871 Zobrazit plný text záznamu