| Autor: |
Felipe A. Costa de Oliveira, Bruno H. Santos Guimaraes, Davies W. Lima de Monteiro, Gustavo M. Ferreira |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
2018 33rd Symposium on Microelectronics Technology and Devices (SBMicro). |
| DOI: |
10.1109/sbmicro.2018.8511480 |
| Popis: |
This paper reports on an innovative double an-chored silicon beam covered with an Aluminum Nitride (AIN) piezoelectric layer and shaped as an Archimedean spiral. The spiral is an alternative to a long double-arm cantilever with conjoint ends. A simplified analytical model is compared to a finite element model and results show a difference between the fundamental resonance frequencies. This difference is further analyzed by comparing the spiral to a double arm cantilever connected at its end. Besides being much more compact, its multiple curvatures increase the natural resonant frequency when compared to a cantilever. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
