MEMS manufacture process of high precision quartz hologram lens

Autor:	滑伟 Hua Wei, 马建设 Ma Jian-she, 韩励想 Han Li-xiang, 苏萍 Su Ping
Rok vydání:	2015
Předmět:	Lens (optics) Microelectromechanical systems Materials science Optics law business.industry Holography Process (computing) business Quartz Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials law.invention
Zdroj:	Optics and Precision Engineering. 23:3107-3113
ISSN:	1004-924X
DOI:	10.3788/ope.20152311.3107
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::35cb160c465eb77cead1b357bf163de2 https://doi.org/10.3788/ope.20152311.3107 Zobrazit plný text záznamu