A novel gate-offset NAND cell (GOC-NAND) technology suitable for high-density and low-voltage-operation flash memories

Autor: S. Satoh, T. Nakamura, K. Shimizu, K. Takeuchi, H. Iizuka, S. Aritome, R. Shirota
Rok vydání: 2003
Předmět:
Zdroj: International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318).
DOI: 10.1109/iedm.1999.823895
Popis: This paper describes a novel scaled and low-voltage-operation NAND EEPROM technology with a G_ate-O_ffset NAND C_ell (GOC-NAND), which is free from program disturbance in a self-boosted program. In GOC-NAND, novel source/drain engineering is introduced for the first time. The program disturbance is decreased by two decades of magnitude in 0.1 /spl mu/m generation, without area penalty and additional process steps. Furthermore, the program disturbance is not increased by scaling and low voltage operation. Therefore, GOC-NAND is indispensable technology for gigabit-scaled NAND EEPROMs.
Databáze: OpenAIRE