Calculation and simulation on mid-spatial frequency error in continuous polishing

Autor:	刘义彬 Liu Yibin, 谢磊 Xie Lei, 马平 Ma Ping, 张云帆 Zhang Yunfan, 鄢定尧 Yan Dingyao, 游云峰 You Yunfeng
Rok vydání:	2013
Předmět:	Materials science Acoustics Polishing Spatial frequency Electrical and Electronic Engineering Atomic and Molecular Physics and Optics
Zdroj:	High Power Laser and Particle Beams. 25:3307-3310
ISSN:	1001-4322
DOI:	10.3788/hplpb20132512.3307
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::35a6c11d2bcd2b8dff61bed3132bc704 https://doi.org/10.3788/hplpb20132512.3307 Zobrazit plný text záznamu