Imaging X-Ray Multilayer Structures with Cross-Sectional HREM
| Autor: | Y. Cheng, M.B. Stearns, D.J. Smith, D.G. Stearns |
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| Rok vydání: | 1992 |
| Zdroj: | Physics of X-Ray Multilayer Structures. |
| DOI: | 10.1364/pxrayms.1992.pd5 |
| Popis: | High-resolution electron microscopy (HREM), with a resolution below 2Å, is the best tool for observing the actual detailed structure for ML. This gives direct atomic scale information about the film structure, including the bilayer thickness, the crystalline structure and the roughness of the individual layers and the interlayers. |
| Databáze: | OpenAIRE |
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