Features of InN growth by nitrogen-plasma-assisted MBE at different ratios of fluxes of group-III and -V elements

Autor: L. V. Krasilnikova, E. V. Skorohodov, P. A. Bushuykin, Boris A. Andreev, D. N. Lobanov, A. V. Novikov, Pavel A. Yunin
Rok vydání: 2016
Předmět:
Zdroj: Semiconductors. 50:261-265
ISSN: 1090-6479
1063-7826
DOI: 10.1134/s1063782616020159
Popis: The results of investigations of the effect of the ratios of fluxes of the Group-III and -V elements on the structural and optical properties of an InN film deposited by plasma-assisted molecular-beam epitaxy (MBE) are presented. It is shown that the InN layer consists of free-standing nanocolumns at a flux ratio of III/V < 0.6. InN growth becomes two-dimensional (2D) in the ratio range 0.6 < III/V < 0.9; however, the InN layer has a nanoporous structure. Upon passage to metal-rich conditions of growth (III/V ∼1.1), the InN layer becomes continuous. The passage from 3D to 2D growth is accompanied by an increase in the threading-dislocation density. It results in a decrease in the photoluminescence (PL) intensity of InN at room temperature. The electron concentration in the InN layers amounts to ∼5 × 1018 cm–3, which results in a shift of the PL-signal peak to the wavelength region of 1.73–1.8 μm and to a shift of the absorption edge to the region of ∼1.65 μm.
Databáze: OpenAIRE