Micromachined thermally isolated circuits
| Autor: | Gregory T. A. Kovacs, Erno H. Klaassen, R.J. Reay, C.W. Storment |
|---|---|
| Rok vydání: | 1997 |
| Předmět: |
Bulk micromachining
Materials science Silicon business.industry Metals and Alloys chemistry.chemical_element Biasing Substrate (electronics) Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Surface micromachining chemistry Etching (microfabrication) Electronic engineering Optoelectronics Electrical and Electronic Engineering business Instrumentation Electronic circuit Hillock |
| Zdroj: | Sensors and Actuators A: Physical. 58:43-50 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(97)80223-3 |
| Popis: | This paper details a post-processing technique by which circuitry in an unmodified IC technology is thermally and electrically isolated from the silicon substrate. This method enables new applications for micromachining, including temperature regulation of analog ICs, to be carried out. The process is discussed in detail, along with improved tetramethyl ammonium hydroxide (TMAH) etching chemistries that use strong oxidizers to eliminate hillock formation. Also presented is an electrochemical biasing method that uses circuitry on the silicon being etched during the micromachining step. Work is currently underway to evaluate the use of these micromachining techniques for commercial analog circuit applications, several of which are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full Text from ScienceDirect