Ga Doped a-SiG:H Films Propared by Sputtering Using Composite Target

Autor:	Yasuhiko Inui, Isamu Nakaaki, Tomuo Yamaguchi, Nobuo Saito
Rok vydání:	1997
Předmět:	Materials science Sputtering Composite number Doping Electrical and Electronic Engineering Composite material Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 40:205-208
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.40.205
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::34988a5f38169c351ae0dd4f98ed23e2 https://doi.org/10.3131/jvsj.40.205 Zobrazit plný text záznamu