| Autor: |
刘立人 Liu Liren, 张宁 Zhang Ning, 李光远 Li Gunagyuan, 周煜 Zhou Yu, 卢智勇 Lu Zhiyong, 孙建锋 Sun Jianfeng, 栾竹 Luan Zhu |
| Rok vydání: |
2016 |
| Předmět: |
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| Zdroj: |
Acta Optica Sinica. 36:0828001 |
| ISSN: |
0253-2239 |
| Popis: |
A measuring method of polarization aberration based on aerial image of alternating phase-shift mask is proposed.The polarization aberration is represented by Pauli-Zernike coefficients.The image placement error and best focus shift are measured by image sensor at multiple illumination settings,combined with X and Ylinearly polarized illuminating light.The Pauli-Zernike coefficients are retrieved using the calibrated sensitivity matrix of polarization aberration.The validity of this proposed method is verified by numerical simulations,and the results indicate that the measuring accuracy is less than 3.07 mlambda. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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