Improved EUV filter transmission with plasma cleaning

Autor: Travis Ayers, Brennan Gantner, Ryan Smith, Matthew Beasley, Bruce Lairson, Dave Grove, Heidi Lopez
Rok vydání: 2010
Předmět:
Zdroj: Space Telescopes and Instrumentation 2010: Ultraviolet to Gamma Ray.
ISSN: 0277-786X
DOI: 10.1117/12.857739
Popis: As-fabricated free-standing indium foils were found to have transmission in the 90nm to 120nm band ranging from 10% to 70% of modeled values based on pure indium. Auger depth profiling of the as-deposited indium showed little surface contamination and high purity. However, final freestanding filters were found to have heavy contamination, particularly on the surface. An argon/hydrogen plasma bombardment was developed which improved EUV transmission by 50% to 500% in the finished filters without causing significant pinholes to develop in the foils or appreciably affecting blocking characteristics.
Databáze: OpenAIRE