A review of optical actuators and the impact of micromachining
| Autor: | Barry E. Jones, J.S. McKenzie |
|---|---|
| Rok vydání: | 1993 |
| Předmět: |
Optical fiber
Materials science Amplifier Metals and Alloys Nanotechnology Laminar flow Photothermal therapy Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Surface micromachining law Miniaturization Electrical and Electronic Engineering Reduction (mathematics) Actuator Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. :202-207 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/0924-4247(93)80035-f |
| Popis: | Optically powered fluid actuators are under development, for example, those using the photoacoustic and photothermal effects in closed cells and laminar proportional amplifiers (LPA). A number of the devices could be improved by a reduction in size of certain elements of the actuators, and already silicon micromachining is enabling this miniaturization to be achieved. Some important optical actuators and effects are reviewed in this paper and the prospects for improvements are discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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