Advances in direct optical monitoring using a wideband spectrometer and a new thin film optical monitoring software

Autor:	D. Arhilger, H. Hagedorn, M. Jäger, A. Zöller
Rok vydání:	2022
Zdroj:	Optical Interference Coatings Conference (OIC) 2022.
DOI:	10.1364/oic.2022.wc.7
Popis:	A new thin film optical monitoring software (TOMS) has been developed, supporting the in-situ direct optical monitoring and process simulation with various thickness control strategies. We discuss the functionalities and present various coating results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::34667789dca172d8e42146aedbb4b083 https://doi.org/10.1364/oic.2022.wc.7 Zobrazit plný text záznamu